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MEMS pressure sensor
MEMS pressure sensor is a miniaturized sensor manufactured based on micro nano processing technology, which integrates mechanical structures and electronic components on a silicon-based chip to achieve precise sensing of pressure signals and electrical signal conversion.
Product details
MEMS (Micro Electro Mechanical Systems) is a micro device or system that integrates micro mechanisms, sensors, actuators, signal processing, and control circuits.
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Principle: Silicon Piezoresistive &Silicon Capacitive Application: Automotive electronics, consumer electronics, industrial electronics, industrial automation, medical and health Advantage：Small size, low power consumption, long-term stability, mass production capability, and high sensitivity and reliability |
Basic MEMS process |
MEMS pressure sensor process capability
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Product performance index parameters |
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Product pressure range (range) |
1Mpa、2Mpa、7Mpa |
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Accuracy requirements |
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Repeatability |
<0.2%FS |
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Nonlinear |
<0.2%FS |
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Delay |
<0.1%FS |